Metal-insulator-silicon-insulator-metal waveguides compatible with standard CMOS technology
نویسندگان
چکیده
منابع مشابه
Characterizations of realized metal-insulator-silicon-insulator-metal waveguides and nanochannel fabrication via insulator removal.
We investigate experimentally metal-insulator-silicon-insulator-metal (MISIM) waveguides that are fabricated by using fully standard CMOS technology. They are hybrid plasmonic waveguides, and they have a feature that their insulator is replaceable with functional material. We explain a fabrication process for them and discuss fabrication results based on 8-inch silicon-on-insulator wafers. We m...
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Şükrü Ekin Kocabaş,1,* Georgios Veronis,2,† David A. B. Miller,1,‡ and Shanhui Fan1,§ 1Ginzton Laboratory, Stanford University, Stanford, California 94305, USA 2Department of Electrical and Computer Engineering and Center for Computation and Technology, Louisiana State University, Baton Rouge, Louisiana 70803, USA Received 16 September 2008; revised manuscript received 17 December 2008; publish...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2011
ISSN: 1094-4087
DOI: 10.1364/oe.19.008379